| 詳細(xì)參數(shù) | |||
|---|---|---|---|
| 品牌 | 貝意克 | 型號 | R-T-R |
| 加工定制 | 是 | 產(chǎn)品別名 | 卷對卷連續(xù)生長CVD系統(tǒng) |
|
輸入電源 |
·?Furnace b?AC 208-240V ，50/60 Hz 輸入電壓?110V/220V ??50/60 HZ |
|
Power 功率 |
6KW |
|
Working Temperature 工作溫度 |
·?Max. Temperature: 1200?°C ?(< 1 hr) 最高溫度：1200℃(< 1 hr) ·?Continuous working temperature:?1100?°C 持續(xù)工作溫度：1100℃ |
|
Heating Zone 加熱區(qū) |
·?Heating Zone Length:? ? ? ? ? ?7.87"?(?200+200+200mm) ?加熱區(qū)長度：7.87”(?200+200+200mm) ·?Constant Temperature Zone:??15.74?"?(400mm. +/-??1oC ) ?恒溫區(qū)長度：15.74?"?(400mm. +/-??1oC ) |
|
Heating Elements 加熱元件 |
·?Fe-Cr-Al Alloy doped by Mo ???電阻絲（摻鉬鐵鉻鋁合金） |
|
Processing Tube 爐管 |
·?High purity?quartz tube:??100?mm OD?x?1700?mm Length ???石英管：100（外徑）*1700（長）mm |
|
Copper foil b 銅箔基底寬度 |
≤80mm |
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Copper foil running rate 銅箔前行速度 |
8cm/min---50cm/min 可調(diào) Adjustable |
|
RF Signal frequency 射頻信號頻率 |
13.56MHz±0.005%W |
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Power output 功率輸出范圍 |
0-500W |
|
Vacuum?Dgree 真空度 |
10-1Pa? |
|
Dimensions 尺寸 |
280*60*130cm |
|
Warranty 質(zhì)保 |
One year limited warranty with lifetime support ?(Consumable parts such as processing tubes, and O-rings are not?covered?by the warranty,?please? order replacements at related products below.) 一年質(zhì)保終身支持（消耗品如爐管，O型圈不在質(zhì)保范圍內(nèi)） |
|
Application Note 應(yīng)用 |
·?Equipped with high precision mass flowmeter in the gas system,can control the gas flow ???氣路系統(tǒng)內(nèi)部裝有高精度質(zhì)量流量計(jì)可準(zhǔn)確的控制氣體流量 ·?Gas can mix sufficient in required proportion in the ?static mixing chamber, 設(shè)靜態(tài)混氣室，有助于氣體充分混合，按要求配比 ·?Can match R-T-R laminating & stripping equipment as below: ? 配套石墨烯卷對卷覆膜、剝離設(shè)備如下圖 ? |
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Details 細(xì)節(jié)圖片 |
·?Overall structure 整體結(jié)構(gòu)
·?District 分區(qū)
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