3HXH1000-353日本產(chǎn)業(yè)技術(shù)綜合研究所（以下簡(jiǎn)稱“產(chǎn)綜研”）開發(fā)出了使用碳納米管（CNT）作為電極的“CNT集成化微型電容器（IEDC）”。IEDC是利用類似IC的工藝在硅晶圓上制造的超薄雙電層電容器（EDLC）。
IEDC性能上的特點(diǎn)是能量密度、輸出功率密度及充放電速度均比現(xiàn)有的鋁（Al）電解電容器高，能量密度約為后者的1000倍。與通過小型化不斷擴(kuò)大市場(chǎng)份額的多層陶瓷電容器（MLCC）相比，IEDC也薄很多。
在4英寸晶圓上制造的4700個(gè)CNT集成化微型電容器
3HXH1000-353 采用超薄梳狀電極
這些高性能源于（1）元件結(jié)構(gòu)采用的全新設(shè)計(jì)的EDLC“微型EDLC”，（2）基于光刻技術(shù)的微細(xì)、高精度、高密度加工技術(shù)，（3）高純度碳納米管（CNT）的高導(dǎo)電性和較大的比表面積等。
3HXH1000-353微型EDLC將電容器的兩個(gè)電極做成薄膜并采用梳狀，使電極之間相互咬合。單個(gè)芯片的尺寸不到1mm見方，CNT層的厚度為1～2μm。工作電壓約為1V，靜電容量約為30μF。微型EDLC的研究從2010年左右就開始了，但此次是首次高密度集成到硅晶圓上。
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3HXH1000-353 CENTRAL UNIT
3HXH1000-354 INPUT MODULE
3HXH1000-356 OUTPUT MODULE
3HXH1000-357 POWER SUPPLY UNIT
3HXH1000-365 ROD
3HXH1000-372 SLIDE BEARING FOR MOVING
3HXH1000-374 PALLET HOOK CYLINDER ATTA
3HXH1000-375 PALLET HOOK RACK
3HXH1000-376 RIGHT PALLET HOOK RACK
3HXH1000-377 SYNCHRONISATION SHAFT
3HXH1000-384 LINEAR STEERING BEARING
3HXH1000-385 LINEAR STEERING GUIDE
3HXH1000-389 VALVE
3HXH1000-402 CYLINDER POSITION SENSOR
3HXH1000-404 POWER CABLE
3HXH1000-406 CABLE
3HXH1000-407 ALUMINUN PROFILE
3HXH1000-410 BEARING SUPPORT
3HXH1000-415 CABLE PROTECTION
3HXH1000-432 ROLLER
3HXH1000-433 ACCELERATION ROLLER
3HXH1000-434 MAGNET VALVE
3HXH1000-435 CYLINDER
3HXH1000-449 REINFORCEMENT
3HXH1000-457 BEARING HOUSE
3HXH1000-469 WEDGE
3HXH1000-476 CYLINDER SUPPORT
3HXH1000-477 CYLINDER SUPPORT
3HXH1000-478 SKATE
3HXH1000-480 GEAR WHEEL
3HXH1000-516 AXIS HOLDER
3HXH1000-560 BUSHING
3HXH1000-561 ADJUSTABLE LOCK PART
3HXH1000-565 SPRING
3HXH1000-566 SHAFT
3HXH1000-57 BRACKET
3HXH1000-573 VACUUM MODULE
3HXH1000-574 VACUUM MODULE
3HXH1000-578 VACUUM MODULE
3HXH1000-583 SUCTION CUP
3HXH1000-584 SUCTION CUP
3HXH1000-585 SUCTION CUP
3HXH1000-59 GRIP FINGER
3HXH1000-603 MC CYL. SHAFT FRONT ATTACHMENT
3HXH1000-609 SPECIAL ASSEMBLY TOOL
3HXH1000-61 MOUNTING ROD FRONT
3HXH1000-63 MOUNTING ROD, BACK
3HXH1000-635 VACUUM CUP FILTER
3HXH1000-64 GRIPPERSHAFT
3HXH1000-681 PALLET SENSOR
3HXH1000-682 POWER CABEL
3HXH1000-703 SEARCH CYLINDER
3HXH1000-704 CYLINDER PALLETLIFT
3HXH1000-705 SENSOR PALLETLIFT
3HXH1000-706 SENSOR PALLET SERTCH
3HXH1000-717 VALVE HOUSE
3HXH1000-728 COUPLING SMALL HOOK
3HXH1000-729 CYLINDER SMALL HOOK
3HXH1000-730 NO RETRUN VALVE SMALL HOO
3HXH1000-749 Bus Cable
3HXH1000-78 DISTANCE
3HXH1000-79 CYLINDER
3HXH1114-2 BRACKET
3HXH1117-2 SEARCH CYLINDER BRACKET
3HXH1131-2 search cylinder bracket
3I 000011 FAN PAPST 4650N
3I 000048 CAP DROP 22UF/16V 20% 5MM
3I 001091 FUSE 2,5A T 5X20MM
3I 001149 O-RING 110X2
3I 001215 LAMP ZB2 BW-14 RED
3I 001216 LAMP ZB2 BW-15 YELLOW
3I 001217 LAMP ZB2 BW-13 GREEN
3I 001658 O-RING25X3,53
3I 001697 FUSE E7G 6A
3I 001978 FUSE 5X20MM 1,5A SLOW
3I 002383 MOTOR CONT.2 3TB40 17-OAMO
3I 002386 MOT.PROT.BR. 6-10A
3I 002428 MOTORPROT.BR. 1,6-2,5A 380V
3I 002462 CIRCLIP WRE 80
3I 002528 VALVE 341B34 90/8660 EX IS G5
3I 002537 ORING68X2,62 NITRILE 70SHORE
3I 002620 MARK TAG CAUTION
3I 002688 CABLE DUCT E 30 100X60
3I 002782 RELAY C4-A40X/24V DC
3I 002837 SOCKET S4-B (FOR I-2782)
3I 002937 ROLLERS 305802
3I 002938 ROLLER BEARING 20205K.C3
3I 002939 ADAPTER H205
3I 002940 BEARING NEEDLE
3I 002959 CIRCLIP I42 DIN472
3I 002986 BALL VALVES T13-400-E2AD
3I 002992 SWITCH 07-17502-21 PUSH
FOXBORO A2045BV
FOXBORO CONSOTROL M/6420H
FOXBORO P0500NX
Foxboro D3001SA
FOXBORO P0911JW
Foxboro 873RS-AIXFGZ
Foxboro 83F-D04S1SSRJA-D
FOXBORO 130M-N5
FOXBORO 718TC7125000
FOXBORO 2AI-I3V
FOXBORO IDP10-TS3B01F-S01-FAR4M1L1
FOXBORO P0940AL
FOXBORO CONSOTROL 131M-N2
FOXBORO 841GM-CI1
FOXBORO P0400HJ
FOXBORO K0143AA
FOXBORO INVENSYS P0400VE
Foxboro I/A Series P0930DH
FOXBORO E11GM-HSAA1
FOXBORO E20S-T1FB6
FOXBORO E92-RFN2I
FOXBORO 3A2-D3IB
FOXBORO 821GM-IS1NL2
FOXBORO C0136NL
FOXBORO C0136YUAA
FOXBORO CONSOTROL 760CSA-3A
FOXBORO KIT-C-E27A-C
FOXBORO 823DP-I3K1NH2
FOXBORO P0400VR
FOXBORO CM900HT
FOXBORO P0400VT
FOXBORO P0400HJ
FOXBORO P0400YE
FOXBORO P0902DZ
Foxboro I/A PM400VP
Foxboro 875EO-A3F-A
FOXBORO P0900WA
FOXBORO 910-HD2
Foxboro FPS400-24
FOXBORO 2B8052
FOXBORO 2B8223
FOXBORO 823DP-I3K1NM2
FOXBORO 823DP-I3K1NM2-AM
FOXBORO P0400VU
FOXBORO P0901VK
FOXBORO P0400VU WP20
FOXBORO CM400YR-0C
FOXBORO CONSOTROL 131M-N2
FOXBORO B0132WK
FOXBORO B0142CEHB
FOXBORO 827DF-1G1SHKA1-A
FOXBORO P0400DA
FOXBORO D0127PB
FOXBORO MODEL 136-4-1
FOXBORO 3A2-I2D
FOXBORO P0400YL
FOXBORO P0800KE
FOXBORO P0400YR
FOXBORO PM400YT
FOXBORO P0400ZF
FOXBORO D0105NX
Foxboro D0130BN
Foxboro D3001YJ
FOXBORO P0500WX
FOXBORO P0400QJ
NEW IN BOX FOXBORO 2AX-MUL
FOXBORO AK237AA
Foxboro L0113VL
Foxboro D3001BM
FOXBORO 130M-N4-ECRB
Foxboro 873RS-JIPFGZ
Foxboro D0130CD
Foxboro MWP1500PSI
Foxboro 13FEA
FOXBORO COMPANY I/A SERIES P0400YG
FOXBORO D0162LQ
FOXBORO K0118BE
FOXBORO P0400HJ
FOXBORO P0400DA
Foxboro 873RS-AIXFGZ
Foxboro 83F-D04S1SSRJA-D
FOXBORO P0800MW
FOXBORO APHRAGII PRESSURE TRANSMITTER 0-120IN H2O
FOXBORO 2AX-FJ
FOXBORO 873PH-AIWFGZ
Foxboro 841GM-C1
FOXBORO CIRCUIT BOARD CARD B0132CS
NEW FOXBORO 870EC-TF34M-N
FOXBORO Electronic Transmitter Model 841GM-CI
FOXBORO P0911JT
FOXBORO 595-3096-01
FOXBORO NO138AR
FOXBORO 718TC7125000
FOXBORO P0400YR
FOXBORO L0118UG
FOXBORO N0309SW
FOXBORO P0500PE
Foxboro 67HTG-OH
Foxboro Miran 1B2
Foxboro I/A P0400VU
Foxboro I/A P0400VP
Foxboro AP51B
Foxboro I/A P0400QJ
Foxboro I/A P0400QK
Foxboro D0130BM
Foxboro Differential Pressure 843DP 4-20
FOXBORO PF-1010
FOXBORO A2045BV
FOXBORO A2045BX
FOXBORO P0970EJ
FOXBORO 870EC-LB13A
FOXBORO P0500NX
FOXBORO AG100VK
FOXBORO S-02TI
FOXBORO D0135SN
Foxboro I/A P0400VP
Foxboro I/A P0400QJ
Foxboro I/A P0400QK
Foxboro I/A Series Cards, P0903ZE, P0902UT, P0400DA
Foxboro I/A Series Cards P0903ZE, P0902UT, P0400DA
Foxboro I/A Cards P0903ZE, P0902UT, P0400YV
FOXBORO 8000-PA15
FOXBORO 843DX-H2I2NK
Foxboro FPS400-24
FOXBORO AG100VK
FOXBORO P0400HJ
FOXBORO P0400YE
FOXBORO 75BCA USPP 75BCA
FOXBORO 250PE USPP 250PE
FOXBORO C0162BX USPP C0162BX
FOXBORO 135S NSFP 135S
FOXBORO 135SG NSFP 135SG
FOXBORO 187-101-2706 USPP 1871012706
FOXBORO 2AT-SBU-L NSFP 2ATSBUL
FOXBORO 2AX-ALMB-R NSFP 2AXALMBR
FOXBORO 2AX-SGC NSFP 2AXSGC
FOXBORO 3001YG USPP 3001YG
FOXBORO 386-2891-01 USPP 386289101
FOXBORO 556-8-51 NSFP 556851
FOXBORO 600-4497-01 USPP 600449701
FOXBORO 8364 USPP 8364
FOXBORO 841GMBI1 NSFP 841GMBI1
FOXBORO 99D250 USPP 99D250
FOXBORO B0131MM USPP B0131MM
FOXBORO B0131WB USPP B0131WB
FOXBORO B0131XUF NSPP B0131XUF
FOXBORO B0132UE NSPP B0132UE
FOXBORO B0132UW USPP B0132UW
FOXBORO B0133AL USPP B0133AL
FOXBORO B0134SV USPP B0134SV
FOXBORO B0134ZR USPP B0134ZR
